Microelectronic Engineering

Microelectronic Engineering is a journal on the fabrication and characterisation of micro and nano scale electronic devices, published by Elsevier.《Microelectronic Engineering》是一份聚焦微纳尺度电子器件制造与表征的期刊，由爱思唯尔出版。

It was founded in 1983 during the rise of integrated circuit processing, and it carries work at that intersection of physics and manufacturing.该刊创办于 1983 年集成电路工艺兴起之际，刊载处于物理学与制造交界处的工作。

In the 2025 edition of the journal citation report it holds an impact factor of 3.3, and it stands in the second quartile of optics and of applied physics.在 2025 年版期刊引证报告中，该刊的影响因子为 3.3，在光学类目与应用物理类目均列第二区。

Scope

• The journal takes fabrication and characterisation as its twin subjects, and it asks how a device is made and how it is measured.该刊以制造与表征为双主题，追问器件如何被做出、如何被测量。

• Micro and nano electronic materials are treated, and the journal carries work on novel electronic nanomaterials.微纳电子材料得到处理，该刊刊载新型电子纳米材料方面的工作。

• Devices are named, and the journal admits work on how a structure is built and how it performs a function.器件被点名，该刊收载结构如何被构建、如何实现功能的工作。

• Circuits are part of the remit, and the journal takes work on how components are brought together into a working whole.电路属于收稿范围，该刊收载元件如何被组合为可运作整体的工作。

• Working mechanisms are pursued, and the journal carries work on why a device behaves as it does.工作机制受到追问，该刊刊载器件为何如此表现的工作。

• Performance and yield are weighed, and the journal admits work on how many of a batch work and how well.性能与成品率受到权衡，该刊收载一批之中有多少可用、可用到何种程度的工作。

• Variability is named, and the journal takes work on how far one device differs from the next and why.变异被点名，该刊收载器件之间相差多少、为何相差的工作。

• Stability and reliability are treated, and the journal carries work on how a device holds up over time and under stress.稳定性与可靠性得到处理，该刊刊载器件如何随时间与应力保持表现的工作。

• Fabrication techniques are a subject in their own right, and the journal admits work on a new way to pattern or to deposit.制造技术本身即是选题，该刊收载图案化或沉积新方法方面的工作。

• Characterisation techniques are named, and the journal takes work on how a structure is imaged and how a property is probed.表征技术被点名，该刊收载结构如何成像、性质如何探测的工作。

• Electronics is a named field, and the journal carries work on the devices that switch and carry a signal.电子是被点名的领域，该刊刊载开关与传递信号的器件方面的工作。

• Photonics is treated, and the journal admits work on devices that make, guide or detect light.光子学得到处理，该刊收载产生、导引或探测光的器件方面的工作。

• MEMS are part of the remit, and the journal carries work on tiny mechanical structures made by the same means.微机电系统属于收稿范围，该刊刊载以同一套办法做出的微小机械结构方面的工作。

• Life sciences applications are named, and the journal takes work on a device that meets a biological or a medical need.生命科学应用被点名，该刊收载满足生物或医学需求的器件方面的工作。

• Simulation is admitted in a limited way, and the journal takes work on material properties and on compact models of a circuit.模拟以有限的方式受到收载，该刊收载材料性质与电路紧凑模型方面的工作。

• Papers that stay inside pure theory are not the aim, and the journal asks that a finding be tied to a device that can be made.纯粹停留于理论的论文并非其旨，该刊要求发现系于可被做出的器件。

History

• The journal was founded in 1983, and it first appeared from publishers in Amsterdam and Tokyo.该刊创办于 1983 年，最初由阿姆斯特丹与东京的出版方发行。

• Two houses issued the early volumes jointly, and the journal has since been published by Elsevier alone.早期各卷由两家出版社联合发行，此后该刊仅由爱思唯尔出版。

• The pair of numbers has stayed with the title, and the print and electronic editions share the same strings of digits.该对刊号一直伴随题名，印本与电子版共用同样的数字串。

• A volume is no longer tied to a single issue, and the journal now gathers several volumes into a year.卷不再系于单一一期，该刊如今把数卷汇入一年。

• Articles are published continuously rather than held for an issue, so that a paper appears once it has been accepted.论文连续发表而不留待某一期，一旦被录用即行出现。

• A companion journal was launched later, and Micro and Nano Engineering shares the aims and the editorial team of this title.一份伴随刊物后来创办，《Micro and Nano Engineering》与本刊共享宗旨与编辑团队。

• That companion is open access throughout, while the older title remains a subscription journal that offers an open route.那份伴随刊物完全开放获取，而更早的这份仍为订阅刊物，另提供一条开放路径。

• The journal is hybrid, and an author may pay a charge to make a paper free to read or leave it behind a subscription.该刊为混合模式，作者可以缴费使论文免费阅读，也可以留其在订阅之后。

• The impact figure has held near three for several editions, standing at 2.6 for 2023 and reaching 3.3 in the 2025 edition.影响因子连续几版维持在 3 附近，2023 年为 2.6，2025 年版为 3.3。

• The journal is indexed in the science citation index expanded, and it is carried in Scopus and in the chemical abstracts service.该刊被科学引文索引扩展版收录，并被 Scopus 与化学文摘服务收录。

• Its papers are also listed in PubMed on a selective basis, and the journal reports those citations as selected only.其论文亦以择选方式列入 PubMed，该刊把这些收录记为仅择选。

• Virtual special issues are assembled from time to time, and the journal has gathered open access papers on fabrication.该刊不定期编成虚拟专刊，曾汇集关于制造工艺的开放获取论文。

Editors

• Mario Lanza of the King Abdullah University of Science and Technology is editor-in-chief, and he took the post in January 2022.阿卜杜拉国王科技大学的（Mario Lanza）担任主编，他于 2022 年 1 月出任此职。

• His own field is the physics of resistive switching devices, and he works on two dimensional materials in microchips.其本人领域为阻变器件的物理，研究微芯片中的二维材料。

• He succeeded Evangelos Gogolides, who had held the office from 2011 and retired at the end of 2021.他接替（Evangelos Gogolides），后者自 2011 年起担任该职并于 2021 年底卸任。

• A group of editors is drawn by region and by subject, and the journal lists one for each of several parts of the world.一组编辑按地区与学科遴选，该刊为世界若干地区各列一位。

• Handling editors are named for such areas as lithography, nanoimprint and bio micro systems.该刊为光刻、纳米压印与生物微系统等领域分别指定责任编辑。

• The journal sets out the classes of manuscript it takes, along with the length and structure each of them should follow.该刊列明所收稿件的类别，以及各类别应遵循的篇幅与结构。

• Each paper is sent to independent referees, and the review is anonymous on the side of the reviewer.每篇论文送交独立审稿人，评审在审稿人一侧为匿名。

• The journal reports a first decision in about six days, and a decision after review in about forty one days.该刊报告首次决定约为六天，评审后的决定约为四十一天。

• A publication charge applies to a paper taken by the open route, and the journal publishes the amount on its own pages.以开放路径收录的论文须缴纳出版费用，该刊在自身页面上公布金额。

• Authors must declare any competing interest, and the journal states its ethical requirements in full.作者必须声明任何利益冲突，该刊完整说明其伦理要求。

• Where a claim rests on a measurement, the journal asks that the fabrication steps be described in full so that another laboratory can repeat the device.论断若依赖某项测定，该刊要求完整描述制造步骤，使另一实验室可以复现该器件。

• The journal is read by device physicists and by process engineers, by materials scientists and by circuit designers, and it writes for all of them.该刊的读者既有器件物理学家与工艺工程师，也有材料科学家与电路设计者，它为这几类人写作。

• Work that carries a laboratory process toward a wafer is given room, and the journal asks what the carrying changes.把实验室工艺带向晶圆的工作有篇幅可用，该刊追问这一带动改变了什么。

• Studies that report a negative result are taken, since a process step that failed to work is worth recording.报告阴性结果的研究也在收载之列，因为未能奏效的工艺步骤同样值得记录。

• Work on a new lithographic route appears among the subjects, and the journal carries papers on how a finer feature is printed.新光刻路线方面的工作列于选题之中，该刊刊载更细特征如何被印出的论文。

• Work on a sensor made by micro fabrication is treated, and the journal admits papers on how such a device is read out.以微制造做出的传感器得到处理，该刊收载这类器件如何被读出的论文。

• The journal keeps its reviews distinct from its original reports, and a reader can tell from the rubric which is which.该刊把综述与原始报告区分开来，读者可从栏目看出何者为何者。

• Work on packaging and on three dimensional integration is named, and the journal takes papers on how layers are stacked and joined.封装与三维集成被点名，该刊收载层如何堆叠与结合方面的论文。

• The journal follows the publisher's policy on research integrity, and it records corrections and withdrawals where they arise.该刊遵循出版方的研究诚信政策，出现更正与撤稿时予以记录。

• A study that ties a measurement to a working device is favoured over one that reports a figure of merit alone.把测定系于可运作器件的研究，较之仅报告某项优值者更受青睐。